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DAS - Model Aquabate -Wet Scrubbers
Maintenance of AQUABATE wet scrubbers is quick and easy with access for operation and maintenance on the front and back sides. The cost-effective system requires only small space. Operation costs and general safety can be optimised with a process tool interface.
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AQUABATE FLEX – Modular Waste Gas Treatment
AQUABATE FLEX is a modular wet scrubber for efficient treatment of water-soluble components from waste gases of different applications. The gas inlets are specifically designed to prevent blockages. AQUABATE FLEX is available as one- or two-stage scrubber. Based on the compact and modular design, the wet scrubber will be optimised to customer requirements. Depending on the configuration of the scrubber the gas inlets can be optionally heated up to the scrubber stage or the washing liquid tank in order to avoid problems caused by condensing gas in the waste gas supply. To increase washing efficiency the scrubbing liquid can be enhanced optionally with chemicals.
The waste gases of the process tool are introduced into the scrubber through up to four separate connections, specifically designed to prevent blockages. Subsequently, the gas stream is purified according to a cocurrent or countercurrent principle by a packed-bed or spray washer. The removal of water-soluble components from the gas stream is achieved by physical absorption in water. To increase washing efficiency the scrubbing liquid can be enhanced optionally with chemicals. The system can be designed as a one- or two-stage scrubber. After the last absorption step, entrained washing liquid drops are removed from the clean gas flow by a demister. The system is controlled automatically by a programmable logic controller and meets the safety requirements of the SEMI S2.
- Available in 6 Variations
- No inlet clogging
- Small Footprint
- Dimensions (W x D x H): 1165 mm x 820 mm x 1944 mm
- Access to maintenance area on front and back side
- Gas entry: max. 4 x DN40 — DN150
- Gas outlet: 2 x DN100 or DN150 (application-specific)