DAS Environmental Expert GmbH products

Water & Wastewater Treatment

DAS - Wastewater Treatment Plant

OTTELIA is an innovative solution for the removal of silicon dioxide (SiO2) particles from process wastewater – particularly from wet cleaning and etching processes in semiconductor manufacturing. The system reliably eliminates even the finest particles from wastewater, creating the conditions for safe recirculation of treated water for reuse in waste gas treatment.

DAS - Moving Bed Biofilm Reactor (MBBR)

As specialists in the biological treatment of industrial wastewater, we have developed a unique compact plant design called SALVINIA. With SALVINIA 70, SALVINIA 170, SALVINIA 470 and SALVINIA 1060 we offer MBBRs (Moving Bed Biofilm Reactor) in four standard sizes. For our customers in the pharmaceutical, food, beverage, dairy, chemical, and paper industries, among others, we combine effectiveness and compactness with time and cost advantages in this product group.

DAS - Membrane Bio Reactor (MBR)

Another wastewater treatment method that can be used in the semiconductor industry is the Membrane Bio Reactor (MBR). Here, the activated sludge process is combined with membrane filtration to retain particles and activated sludge before the biologically treated wastewater is discharged.

Waste Gas Treatment - Burn/Wet Systems for Waste Gas Treatment

DAS - Waste Gas Treatment Systems

All ESCAPE systems have a small footprint with service and maintenance access from the front and back. Installation is quick and easy and does not require specialised equipment. Operation costs and general safety can be optimised with a process tool interface.

DAS - Waste Gas Treatment System

STYRAX

STYRAX – Waste Gas Treatment for Waste Gases from Demanding CVD Processes. The STYRAX product family was specifically developed to manage demanding waste processes like CVD processes in the semiconductor and photovoltaic industry. Our application specialists configure the system, which is available as a burn-wet or plasma-wet system, to meet customer-specific requirements. In this way, media consumption can be adopted flexibly.

DAS - Waste Gas Treatment

TILIA is a system for the disposal of pyrophoric, fluorinated, toxic or long-lived environmentally harmful gases and reaction products which are used in chemical and physical processes in the semiconductor and solar industry or are generated by the process. Disposal takes place via combustion and subsequent treatment in a scrubber, where particles are separated and soluble gas components are abated using a scrubbing liquid. TILIA offers outstanding efficiency in terms of footprint to throughput ratio. Operating costs can be optimised through the additional integration of a process tool interface.

DAS - Optimized Waste Gas Treatment System

The UPTIMUM product line has been designed for higher tool uptime especially in CVD processes in the semiconductor and solar industry. The product name UPTIMUM refers to the term “Uptime“ underlining the high availability of the burn/wet system. The tool can be applied to different applications.

Waste Gas Treatment - Wet Scrubber

DAS - Wet Scrubbers

Maintenance of AQUABATE wet scrubbers is quick and easy with access for operation and maintenance on the front and back sides. The cost-effective system requires only small space. Operation costs and general safety can be optimised with a process tool interface.