DAS - Model STYRAX -Waste Gas Treatment System

STYRAX – Waste Gas Treatment for Waste Gases from Demanding CVD Processes. The STYRAX product family was specifically developed to manage demanding waste processes like CVD processes in the semiconductor and photovoltaic industry. Our application specialists configure the system, which is available as a burn-wet or plasma-wet system, to meet customer-specific requirements. In this way, media consumption can be adopted flexibly.