3D-Micromac AG

microPREP™Model 2.0 -High-Throughput Laser Based Microdiagnostics Sample Preparation

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microPREP™ 2.0 enables high-volume sample preparation of metals, semiconductors, ceramics, and compound materials for microstructure diagnostics and failure analysis. The system can be used for a variety of semiconductor sample preparation applications, including in-plane geometries and bulk samples, cross-sections, box milling for diagnostics of electrical connections and 3D chip-level structures, and full line cuts for complex investigations of complete devices. microPREP™ 2.0 complements existing approaches to sample preparation such as FIB processing and is suited for SEM inspection of avanced packaging devices, X-ray microscopy, atom probe tomography, and micro mechanical testing.

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  • Shorter time to sample: up to 10 000 times faster than FIB
  • Up to an order of magnitude lower CoO
  • High degree of automation due to recipe-based, ergonomic user interface
  • Virtually no structural damage and no elemental contamination by ps laser processing
  • Providing larger-sized samples with micron-level precision
  • Enables the creation of samples with complicated/3D shapes (TSVs, SiP)
  • Meets the essential requirements of the SEMI S2/S8