- Home
- Companies
- Korvus Technology Ltd
- Products
- KorvusTech - Model HEX Series - Highly ...
KorvusTech - Model HEX Series -Highly Modular PVD Systems
The HEX Series of thin film deposition systems provide a versatile range of deposition options for your research and implementation applications. To get started, you’re welcome to purchase the base model and upgrade to higher-level components to suit your needs as necessary. These upgrades are modular and simple to install, which reduces system downtime and installation costs. The HEX Series includes the benchtop HEX and the larger HEX-L and HEX-XL Systems. (See “HEX vs HEX-L vs HEX-XL page). All systems come with turbomolecular pumps which allow for vacuum in the 10-6 to 10-7 mbar range. The benchtop HEX allows for sample sizes up to 100 mm, but also comes with a multi-sample holder that can accommodate several smaller samples simultaneously. The system contains many upgrade options, including a 300 l/s pump that can achieve a base vacuum pressure in reduced time frames.
The HEX system consists of a six-sided aluminium-framed high-vacuum chamber that is lightweight yet rigid enough for most physical vapour deposition applications. The hexagonal structure supports six modular panels, including:
- Blank panel
- Viewport panel
- Deposition source panel
- QCM panel for in-situ monitoring
HEX 2- An example of Korvus' unique "stacking" concept, where one HEX chamber is placed atop another to increase source-sample distance, useful for lift-off applications and better uniformity. This extra chamber can be added or removed at any point after purchase.
The HEX Series are ideal for research and development due to their modular nature. All essential elements are accessible, allowing testing of various components and thorough exploration of the processes involved in several thin-film deposition techniques, including:
- Sample preparation for surface analysis
- Sputtering
- Thermal evaporation
- Organic physical vapour deposition
Supported methodologies in the base model include:
- Metal and photoresist lift-off process
- EM sample preparation
- New coating research and development
- Magnetron sputtering deposition optimisation
Should your use case require additional functionality, the HEX system contains many other modules that expand the scope of the system for most thin film deposition processes.