Semicorex - Model SiC -Coated ICP Component

Semicorex`s SiC-Coated ICP Component is the top choice for wafer handling processes that require high-temperature and chemical resistance. Our carriers provide even thermal profiles, laminar gas flow patterns, and prevent contamination or impurities diffusion thanks to our fine SiC crystal. With a fine SiC crystal coating, our carriers provide superior heat resistance, even thermal uniformity, and durable chemical resistance.

At Semicorex, we focus on providing high-quality, cost-effective products to our customers. Our SiC-Coated ICP Component has a price advantage and is exported to many European and American markets. We aim to be your long-term partner, delivering consistent quality products and exceptional customer service.

Contact us today to learn more about our SiC-Coated ICP Component.

• Avoid peeling off and ensure coating on all surface
• High temperature oxidation resistance: Stable at high temperatures up to 1600°C
• High purity: made by CVD chemical vapor deposition under high temperature chlorination conditions.
• Corrosion resistance: high hardness, dense surface and fine particles.
• Corrosion resistance: acid, alkali, salt and organic reagents.
• Achieve the best laminar gas flow pattern
• Guarantee evenness of thermal profile
• Prevent any contamination or impurities diffusion