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TAPI - Model CAT-O3 Series -Catalytic Ozone Destructs
FromTeledyne API
The CAT-O3 series of ozone destructs safely decompose high concentrations of ozone gas to sub-ppm levels that are below recommended ozone safety limits. The catalytic method of decomposition uses a metal oxide catalyst to passively convert the ozone to oxygen. The CAT-O3 series of ozone destructs are made from a welded stainless steel enclosure protected with a heat shield. They are carefully designed to meet the industry’s stringent safety performance requirements.
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- All welded construction
- Self contained
- Rapid reaction time
- No consumables
- No maintenance
- Simple installation
- Application : Catalytic Ozone Destruct
- Principle of Operation : Catalytic
- Catalyst : Manganese dioxide based compound
- Outlet Concentration :
- Material : Aluminum with SS fittings
- Capacity (up to) :
- CAT-03-E: 20 SLPM at 340 g/Nm3
- CAT-03-F: 36 SLPM at 340 g/Nm3
- CAT-03-G: 88 SLPM at 200 g/Nm3
- Inlet/Outlets :
- CAT-03-E: 1/2" stainless steel stubs (other fittings available)
- CAT-03-F: 1/2" stainless steel stubs (other fittings available)
- CAT-03-G: 3/4" stainless steel stubs (other fittings available)
- Outside Cylinder Dimensions (LxDxH) :
- CAT-03-E: 17.00" x 4.00" x 5.13" (431.80 mm x 101.60 mm x 130.30 mm)
- CAT-03-F: 25.50" x 4.00" x 5.13" (640.08 mm x 101.60 mm x 130.30 mm)
- CAT-03-G: 23.28" x 7.00" x 7.38" (591.30 mm x 177.80 mm x 187.50 mm)
- External Temperature : Below 30°C or 86°F
- Maintenance : None
- Lifetime : 3 to 5 years or longer
- Heater Option : Available for wet off gas applications
- Warranty : 1 year
- Semiconductor
- CVD TEOS/Ozone
- ALD
- MOCVD
- Ashers
- Wet Benches
- Spray Tools
- Other
