Teledyne API
TAPI - Model OG-5000 Series -High Purity Water Cooled Ozone Generator
FromTeledyne API
The OG-5000 series of ozone generators is designed to produce high concentrations of ultra clean ozone gas for use in semiconductor applications including CVD, ALD thin film, oxide growth and wet bench cleaning processes. The OG-5000 series has a compact, water cooled design that can be easily integrated with Teledyne API`s ozone system controller, ozone leak detectors, ozone concentration monitors and ozone destructs. Its proven technology makes it ideal for a wide range of semiconductor process applications.
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- High purity ozone
- High ozone concentrations
- Low cost of ownership
- No consumables
- Compact and modular
- Proven technology
- Maximum Ozone Production :
- OG-5000-A 210 g/hr
- OG-5000-B 150 g/hr
- Interface
- Control Interface : Front panel or automatic remote control
- Remote Control : Remote on/off
- Feed Gas :
- Oxygen Grade: Grade 6 or better
- Nitrogen for doping only: Grade 5 or better (0.5% only)
- Feed gas flow rate: 0.5 to 20 slpm
- Operating Conditions
- Ozone Outlet Pressure : 15 to 40 psig (typically set to 30 psig)
- Operating Ambient Temperature : 5-35°C
- Cooling Water Temperature : 18°C + 2°C
- Cooling Water Flow : 2.5 GPM
- Cooling Water Quality : Demineralized Cooling Fab Water
- Power
- VAC : 208/240 VAC 1 Phase or 3 Phase
- Frequency : 50 or 60 Hz
- Current : 20 A 1ф or 15 A 3ф
- Physical Specifications
- Dimensions (WxHxD) : 19" x 10.5" x 18" (48 cm x 27 cm x 45 cm)
- Weight : 82 lbs. (37 kg)
- Compliance : CE
- Warranty : 1 year
- Semiconductor
- Chemical Vapor Deposition (CVD)
- Atomic Layer Deposition (ALD)
- Oxide growth
- Surface conditioning
- Particle cleaning
- Photoresist removal
- Ashing
- Others