Scientific instrumentation solutions for CMP slurries, content of large particles sector - Monitoring and Testing - Laboratory Equipment
There are two papers published on subject of applicability of ultrasound for characterizing CMP slurries, see below. There are also 2 newsletters, # 1 and # 13 on the same subject. Acoustics provides accurate particle size that agrees well with independent data. It can monitor presence of 1% large particles on the background of small nano-particles. Electroacoustics yields very precise value of zeta potential. These measurements can be done with no dilution, which opens possibility for continuous on-line control of the slurry properties. However, calculation of the particle size and zeta potential requires information on the volume fraction. This parameter must be independently measured.