Our operations include a dynamic production floor for new advance CMP tools and remanufactured legacy processing tools, a fully equipped class 100 foundry cleanroom for development and foundry processing, and a worldwide parts & services department for existing equipment including over 6000-line items of CMP and grinder parts.

At Axus Technology, our prestigious Process Development Group is here to facilitate your need for advances in wafer technology and efficient wafer production with new designs and novel applications. We implement turnkey solutions for process development, foundry processing, and equipment tooling including tool installation and training, field service, and consumable selection.

As a recognized industry leader, we are your source for leading-edge surface processing solutions!

Axus Technology Downloads

Strasbaugh 7AA - Data Sheet

Post-Cmp Cleaning Tool 412S - Data Sheet

G&P POLI-400L - Data Sheet

G&P POLI-500 - Data Sheet

Water Reduction and Waste Treatment System - Data Sheet