- Products for Gas Analysis
- Products for Surface Analysis
- Products for Catalysis and Thermal Analysis
- Products for Thin Films, Plasma and Surface Engineering
- Products for Residual Gas Analysis
- Sampling Inlets for Hiden Mass Spectrometers - Gas Sampling Inlets
- Sampling Inlets for Hiden Mass Spectrometers - Multistream Gas Sampling Inlets
- Sampling Inlets for Hiden Mass Spectrometers - Gas Sampling Inlets - Thermal Analysis
- Sampling Inlets for Hiden Mass Spectrometers - Gas Sampling Inlets - Dissolved Gases in Liquids
- Fusion Research
Hiden Analytical Ltd. products
Products for Thin Films, Plasma and Surface Engineering
Hiden - Model HPR-30 Series - Residual Gas Analyser for Vacuum Process Analysis
The HPR-30 Series are residual gas analysis systems configured for analysis of gases and vapours in vacuum processes and for vacuum diagnostics with sampling capability from high vacuum to atmospheric pressure. The systems are fully configurable for individual process applications such as CVD, ALD, plasma etching, MOCVD, process gas purity and in-process contaminant monitoring.
Hiden - Model HPR-60 MBMS - Molecular Beam Mass Spectrometer System for Analysis of Neutrals, Radicals and Ions
The Hiden HPR-60 molecular beam mass spectrometer is a compact skimmer inlet MS for the analysis of atmospheric plasma and reactive gas phase intermediates.
Hiden - Model HMT - Dual Mode RGA System for Vacuum Diagnostics and Process Monitoring
The Hiden HMT quadrupole mass spectrometer is a unique dual mode RGA system capable of operating at pressures up to 5×10-3 mbar without the need for differential pumping. Operation at this pressure is achieved using a specially designed ion source/quadrupole filter combination and software which corrects for abundance non-linearity. The unique high pressure specification makes the HMT ideal for process monitoring applications.
Hiden - Model EQP Series - High Performance Combined Mass and Energy Quadrupole Mass Spectrometers Systems for Plasma Research
High performance combined mass and energy quadrupole mass spectrometers for the characterisation of plasmas. EQP-6 300 or 510 amu mass range with 6 mm triple filter quadrupole mass spectrometer for a wide range of plasma research applications. EQP-9 9 mm triple filter quadrupole-based systems, featuring the broadest range of mass options available. 50 to 5000 amu options for high stability measurements and ion cluster analysis. EQP-20 featuring Hiden’s 20 mm triple filter quadrupole with zone I/zone H switchable for 20 amu with 0.003 amu peak width, and 200 amu mass range with unit mass resolution for characterisation of hydrogen isotope plasmas.