Hiden Analytical Ltd. products

The Hiden Compact SIMS tool is designed for fast and easy characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table. The ion gun geometry set to provide is ideal for nanometre depth resolution and near surface analysis.

Hiden Analytical has developed a fully self-contained automatic surface analysis system in the AutoSIMS, an innovative secondary ion mass spectrometer (SIMS) that can perform routine and repetitive analysis with unattended operation. With a fully-automated X-Y stage and expanded holder, the AutoSIMS by Hiden can run hundreds of processes a day during uninterrupted 24/7 operation.

The Hiden TOF-qSIMS system is designed for surface analysis and depth profiling applications of a wide range of materials including polymers, pharmaceuticals, superconductors, semiconductors, alloys, optical and functional coatings and dielectrics, with measurement of trace components to sub-ppm levels.

The Hiden MAXIM quadruple SIMS analyser is a state of the art secondary ion mass spectrometer for positive and negative, static, dynamic and neutral analytical applications. The MAXIM analyser system includes an integral energy filter for ion acceptance at 30° to the probe axis, high transmission SIMS extraction optics, triple mass filter, pulse ion counting detector and control electronics.

The IG5C features a low power, high brightness, surface ionization source coupled to a compact ion column, providing high performance in a small package. The gun is designed as a primary ion beam for all SIMS applications, dynamic, static and imaging.

The IG20 features a high brightness electron impact gas ion source which is designed specifically for oxygen capability but is also suitable for use with inert and other gases.