IXRF Systems Inc products

micro-XRF µXRF / µEDXRF

IXRF - Model ATLAS M - Benchtop micro XRF Spectrometer

IXRF Systems’ ATLAS M benchtop microEDXRF (micro XRF) spectrometer is the latest general-purpose micro spot energy dispersive X-ray fluorescence (EDXRF) spectrometer microscope for the measurement and mapping of elements from sodium (Na) through uranium (U). Designed to image and analyze a wide variety of sample types, ATLAS leads the industry in virtually every major specification category, from the most powerful software and the highest detector active area to our superior perpendicular (normal) X-ray tube geometry and smallest micro spot.

Model ATLAS X - micro XRF Spectrometer

IXRF Systems’ ATLAS X mainframe micro-XRF spectrometer is the latest general purpose micro/small spot energy dispersive X-ray fluorescence (μXRF) spectrometer for the measurement and imaging/mapping of elements from sodium (Na) through uranium (U). Designed to image and analyze a wide variety of sample types, ATLAS leads the industry in virtually every major specification category from the most powerful software and the largest detector active area, to our superior perpendicular geometry and tiny 5 μm diameter micro XRF spot.

Model ATLAS SEMI - micro EDXRF Metrology Tool

IXRF Systems’ ATLAS SEMI is the very latest micro spot energy dispersive X-ray fluorescence (micro XRF) imaging spectrometer for semiconductor metrology. Designed to image and analyze (edge-to-edge) wafers up to 300 mm diameter, ATLAS leads the industry in virtually every major specification category from the largest chamber and the highest detector active area, to the longest mapping travel and smallest X-ray micro-spot.