Teledyne API products

The AC series of ozone generators offers silent corona discharge technology in a very compact package. The ceramic-based, industrial grade ozone generators are capable of producing concentrations of ozone in excess of 200 g/Nm3 or 14% w/w. The AC series generators are available in a 19 inch rack-mount enclosure or a rugged, wall-mount enclosure designed for harsh and demanding industrial environments. For ease of use, each AC series ozone generator has an integrated controller enabling it to operate in local or remote mode. The built-in forced air cooling system is designed to efficiently circulate air through the system to cool the ozone generating cell and internal power supply. The only maintenance required is periodic replacement of the cooling air filters.

The OG-5000 series of ozone generators is designed to produce high concentrations of ultra clean ozone gas for use in semiconductor applications including CVD, ALD thin film, oxide growth and wet bench cleaning processes. The OG-5000 series has a compact, water cooled design that can be easily integrated with Teledyne API`s ozone system controller, ozone leak detectors, ozone concentration monitors and ozone destructs. Its proven technology makes it ideal for a wide range of semiconductor process applications.

The ODS series of High Concentration High Purity Ozone Gas Delivery Systems is designed for use in the most demanding semiconductor applications. This highly reliable ODS is ideal for applications requiring high concentration ozone at a wide range of flow rates. The ODS system is a complete turnkey solution that is custom configured to plug and play with most semiconductor tools. Its microprocessor based controller is designed to servo control the ozone delivered to the tool based on user provided setpoints. The ODS system includes a multi-channel ozone leak detector and an exhausted enclosure where all the process gas lines and fittings are double contained.

The Mini ODS is a compact, integrated ozone delivery system designed to produce ozone concentrations of 21% w/w, 320g/Nm3 for a wide range of wafer processing applications. It is a very compact yet complete ozone delivery system, including: a high purity ozone generator, high concentration ozone monitor, microprocessor based controller, and all the required regulators and pneumatics. The Mini ODS is expandable to support additional ozone generators running independent processes that require different levels of ozone concentrations and flow rates. The system is easy to use and maintain. There are no consumables or requirements for preventive maintenance. The Mini ODS can also interface to a dissolved ozone analyzer typically required in wet processes. For added safety, it can be interlocked with Teledyne API’s multichannel ozone leak detectors and ozone destruct sub-systems.

The SCI-552 is a system controller for ozone delivery systems that provides electronic control interfaces for a number of typical system components, including: ozone generators, EV valves, mass flow controllers, back-pressure controllers, Teledyne API 452 ozone sensors, Teledyne API 470 dissolved ozone sensors, and a water chiller. The SCI-552 features hardware and software support for a number of system interlock functions. The SCI-552 provides flexibility for the end user, allowing control of the system via the front panel user interface, MODBUS serial interface, or various discrete digital and analog I/O points. The SCI-552 is designed to support two ozone generators providing two independent channels of ozone output.