Gas monitoring instruments and systems for semiconductor manufacturing
In the semiconductor manufacturing industry, various perfluorinated compounds (PFCs) are used. The emissions of the PFC compounds into the ambient air are reduced by scrubbing of the exhaust gases from the process. In this process, the Gasmet™ FTIR Gas Analyzers can be used to measure the emissions into the atmosphere and also monitor the efficiency of the scrubbers. Typically monitored PFCs in the exhaust gas include carbon tetrafluoride CF4, trifluoromethane CHF3, and hexafluoroethane C2F6.